Calibre Enabling process control through predictive design and virtual metrology for high product mix manufacturing

2024-03-21T02:56:59.000-0400
Computational Lithography

Summary

This is the paper winning the Best Paper & Best Oral Presentation Award at 8th IEEE EDTM Conference 2024.

Details

See the attachment above for the presentation.

KB Article ID# KB000130595_EN_US

Contents

SummaryDetails

Associated Components

Calibre RET/OPC