Calibre 2024 Q3 Calibre Release Highlights - Semi-Manufacturing Solutions

2024-12-03T16:32:06.000-0500
Computational Lithography

Summary

The release highlights presentation includes an overview of new features and best practice recommendations in Calibre Semi-manufacturing solutions for the July 19, 2024 quarterly release.

Details

Key features highlighted include:

  • Production release of Calibre MLDB Xpert – New infrastructure for all tools supporting machine-learning data base (MLDB)
  • Production release of spline-based curvilinear MPC applying Bezier splines and point-based movement for mask process correction
  • New auto model creator utility in Calibre SONR adjusts the hyperparameters for supervised machine learning model creation
  • Bayesian Information Criterion (BIC) method added in Calibre nmModelflow for model testing and selection
  • Reorganized model-assisted template extractor (MATE 3.0) for CNSRAF development

See the attachment for the presentations.

KB Article ID# KB000153863_EN_US

Contents

SummaryDetails

Associated Components

Calibre RET/OPC