This paper was presented at Advanced Semiconductor Manufacturing Conference (ASMC) 2024.
Attachments: | ASMC2024-SiemensEDA-DefectInspectionandReduction5.3_v1.pdf (882 KB) Effective downsampling techniques for SEM defect inspection using design insights in machine learning 1.pdf (202 KB) |
This paper was presented at Advanced Semiconductor Manufacturing Conference (ASMC) 2024.