Calibre Layout simulation for directed self-assembly with chemo-epitaxy methodology

2024-03-19T06:34:43.000-0400
Computational Lithography

Summary

This is the paper jointly presented by EMD Electronics, Merk Chemicals, and Siemens EDA at SPIE Advanced Lithography Conference 2024.

Details

See the attachment above for the presentation.

KB Article ID# KB000130588_EN_US

Contents

SummaryDetails

Associated Components

Calibre DSA Mask Synthesis Calibre DSA Verification (Directed Self-Assembly)